Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report measurements of the far-infrared reflectivity spectra for the pseudobinary system Ga1-xInxSb. Data were analyzed with a Kramers-Kronig dispersion analysis and a damped Lorentzian oscillator formalism. For x<0.30, one TO-phonon mode is evident, whereas for x>0.30, two TO modes are observed. The variations of the TO-phonon frequencies and the mode strengths do not conform to the traditional types of behavior previously used to describe the long-wavelength optical phonons in pseudobinary alloy systems. An alternative classification scheme, based on the occurrence of gap and/or local modes, is proposed. It is sufficiently general to encompass the previously defined classes of behavior, as well as the behavior we report here for the Ga1-xInxSb system. © 1970 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J.C. Marinace
JES
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT