Harold F. Winters, J.W. Coburn, et al.
JVSTA
Paper
Infrared laser induced reaction of SF6 with silicon surfaces
Abstract
No abstract available.
Related
H. Seki, T.J. Chuang, et al.
Surface Science
W. Sesselmann, E.E. Marinero, et al.
Surface Science
T.J. Chuang, G.W. Hoffman, et al.
Chemical Physics Letters