Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
In this paper we present a non-linear control scheme for high-speed nanopositioning based on impulsive control. Unlike in the case of a linear feedback controller, the controller states are altered in a discontinuous manner at specific instances in time. Using this technique, it is possible to simultaneously achieve good tracking performance, disturbance rejection and tolerance to measurement noise. Impulsive control is demonstrated experimentally on an atomic force microscope. A significant improvement in tracking performance is demonstrated. © 2011 IOP Publishing Ltd.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Hiroshi Ito, Reinhold Schwalm
JES
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997