B.D. Terris, S. Rishton, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A high-sensitivity fiber-optic displacement sensor for atomic force microscopy is described. The sensor is based on the optical interference occurring in the micron-sized cavity formed between the cleaved end of a single-mode optical fiber and the microscope cantilever. As a result of using a diode laser light source and all-fiber construction, the sensor is compact, mechanically robust, and exhibits good low-frequency noise behavior. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.1 Å. Images are presented demonstrating atomic resolution of graphite and magnetic force imaging of bits written on a magnetic disk.
B.D. Terris, S. Rishton, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
D. Rugar, R. Budakian, et al.
SPIE International Symposium on Fluctuations and Noise 2003
B.W. Chui, M. Asheghi, et al.
Microscale Thermophysical Engineering
H.J. Mamin, R. Budakian, et al.
Physical Review Letters