Publication
IITC 2017
Conference paper

Impact of pattern collapse on future micro/nano fabrication

View publication

Abstract

Two mechanical models of pattern collapse, one by capillarity for wet process and the other by van de Waals under dry condition, have been analyzed for 7nm BEOL fine patterns. The effects of the dielectric materials and pattern geometries have been investigated and predictions have been made for future BEOL technology nodes.

Date

Publication

IITC 2017

Authors

Share