J.R. Childress, Michael Ho, et al.
INTERMAG 2002
Ultramicrotomy, the technique of cutting nanometers-thin slices of material using a diamond knife, was applied to prepare transmission electron microscope (TEM) specimens of nanoporous poly(methylsilsesquioxane) (PMSSQ) thin films. This technique was compared to focused ion beam (FIB) cross-section preparation to address possible artifacts resulting from deformation of nanoporous microstructure during the sample preparation. It was found that ultramicrotomy is a successful TEM specimen preparation method for nanoporous PMSSQ thin films when combined with low-energy ion milling as a final step. A thick, sacrificial carbon coating was identified as a method of reducing defects from the FIB process which included film shrinkage and pore deformation. © Microscopy Society of America 2006.
J.R. Childress, Michael Ho, et al.
INTERMAG 2002
Francesca Iacopi, Jai Hyuk Choi, et al.
ADMETA 2010
Patrick M. Braganca, Jordan A. Katine, et al.
IEEE TNANO
Kumar Virwani, Sara E. Harrison, et al.
Applied Physics Letters