IIA-3 p+ Polysilicon Emitters for Sub-0.5 µm High-Performance p-n-p

Paper

01 Jan 1992

IIA-3 p⁺ Polysilicon Emitters for Sub-0.5 µm High-Performance p-n-p

No abstract available.

Conference paper

B.T. Jonker, W.C. Chou, et al.

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Conference paper

B. Davari, C. Koburger, et al.

IEDM 1988

Conference paper

T.C. Chen, J.D. Cressler, et al.

VLSI Technology 1989

Paper

E.F. Crabbé, D.L. Harame, et al.

IEEE T-ED