Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We demonstrate the existence and angular dependence of CH resonances in the carbon K-shell excitation spectra of hydrocarbons. Near-edge x-ray-absorption fine-structure spectra of oriented polyethylene chains exhibit pronounced resonances which are associated with CC and CH bonds as determined from their angular dependence and from X multiple-scattering calculations. The presence of CH resonances is also found in K-shell excitation spectra of free ethylene and ethylene chemisorbed on various metal surfaces. © 1987 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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ACS Macro Letters
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Macromolecules
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering