Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
B. Wagle
EJOR
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010