Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
In the amorphous-to-crystalline phase transformation of thin film CoSi2, all grain boundaries in the crystalline microstructure viewed in projection have the shape of a hyperbola. This is due to the continuous nucleation and constant growth rate which gives circular CoSi2 grains before impingement. Such a mode of transformation results in a macroscopic nonequilibrium state at the triple points where a grain boundary meets two amorphous-to-crystalline interfaces. © 1987 The American Physical Society.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
David B. Mitzi
Journal of Materials Chemistry
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SPIE Advanced Lithography 2007
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Advanced Materials