William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Internal photoemission experiments were performed to study the polarization layer induced by hydrogen at PdSiO2 interfaces. It was found that this polarization layer behaves like a true dipole layer where one monolayer of hydrogen atoms at the interface corresponds to a barrier lowering of 0.5 eV in accordance with earlier measurements on threshold voltage shifts of Pd-SiO2 -Si field effect transistors. Furthermore experiments on AlSiO2 structures indicate that the catalytic dissociation of H2 on metals like Pd and Pt is necessary for the introduction of a hydrogen polarization layer at a metal-SiO2 interface. © 1976.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science