A. Deutsch, G. Arjavalingam, et al.
EPEP 1992
We have developed a thin-film Pt-Ir thermocouple which exhibits bulklike thermoelectric behavior up to 790°C, the highest temperature observed with thin-film pure-element thermocouples. Using a Q-switched Nd laser and a signal averaging oscilloscope, its thermal response time was measured to be 60 ns. The ease of implementation in electronic devices coupled with the reproducibility over a wide temperature range make this thin-film thermocouple well suited for monitoring instantaneous temperatures during device processing.
A. Deutsch, G. Arjavalingam, et al.
EPEP 1992
Y. Pastol, G. Arjavalingam, et al.
APS 1990
A. Deutsch, M. Swaminathan, et al.
IEEE Topical Meeting EPEPS 1993
William M. Robertson, G. Arjavalingam, et al.
SPIE Optics Quebec 1993