Publication
Review of Scientific Instruments
Paper

High spatial resolution infrared emission thermal measurement of laser-induced chemical vapor deposition

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Abstract

Infrared emission radiometry was used as a noncontact temperature probe with a tens of micron spatial resolution for monitoring laser-induced chemical vapor deposition (LCVD). With appropriate calibration of the emissivity, a temperature of 255±15°C was measured during gold LCVD from dimethylhexafluoroacetylacetonate gold (III). Equivalent deposition temperatures were calculated for both continuous and modulated laser illumination. Depending on the deposition conditions, material deposited with a modulated laser beam varied from notably worse (due to stress cracking) to notably better (more uniform growth morphology) than material deposited with continuous laser illumination.

Date

01 Jan 1992

Publication

Review of Scientific Instruments

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