Conference paper
MODEL SYSTEMS IN THE STUDY OF ETCHING MECHANISMS.
F.R. McFeely, J.F. Morar, et al.
Symposium on Plasma Processing 1986
F.R. McFeely, J.F. Morar, et al.
Symposium on Plasma Processing 1986
F.J. Himpsel, F.U. Hillebrecht, et al.
Applied Physics Letters
J.L. Jordan, P.N. Sanda, et al.
JVSTA
J.F. Morar, F.R. McFeely, et al.
Applied Physics Letters