About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
INVMTC 1998
Conference paper
High density data storage based on the atomic force microscope
Abstract
In this study, an approach to atomic force microscope (AFM)-based storage was explored based on mechanical readback of topographic data. To this end, low-mass silicon cantilevers with integrated piezoresistive sensors were fabricated. By reducing the cantilever mass, the mechanical response time was reduced to as low as 90 ns. These cantilevers were developed for both read-only applications and write-once applications.