Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The introduction of syntax directed translations and transformations into formallanguage theory presents a very interesting area with considerable promise of application to questions of syntax and semantics of programming languages. The concept of generalized sequential machine (gsm) mapping (already of importance in language theory) is developed here in its natural extension to trees (or expressions). That generalized concept of gsm mapping encompasses most of the previously defined concepts relating to translations and transformations. © 1970 Academic Press, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Journal of Computer and System Sciences
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AAAI 2025
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SPIE Advanced Lithography 2000