Conference paper
Multilayer resist systems using polysiloxanes as etch masks
J. Paraszczak, J.M. Shaw, et al.
Microlithography 1983
J. Paraszczak, J.M. Shaw, et al.
Microlithography 1983
G. Chiu, J.M. Shaw
IBM J. Res. Dev
J.M. Shaw, J. Gelorme, et al.
IBM J. Res. Dev
J. Paraszczak, E. Babich, et al.
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena