K.J. Stewart, M. Hatzakis, et al.
Polymer Engineering & Science
Paper
Future packaging materials: Cost performance, and environmental issues
Related
Conference paper
High-aspect-ratio resist for thick-film applications
N. LaBianca, J. Gelorme
Microlithography 1995
J.M. Shaw, M. Hatzakis
JES
Conference paper
Multilayer resist systems using polysiloxanes as etch masks
J. Paraszczak, J.M. Shaw, et al.
Microlithography 1983