Conference paper
Epoxy resins for deep UV lithography
K.J. Stewart, M. Hatzakis, et al.
SPE Regional Technical Conference 1988
K.J. Stewart, M. Hatzakis, et al.
SPE Regional Technical Conference 1988
E. Babich, J.M. Shaw, et al.
Microelectronic Engineering
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Marie Angelopoulos, J.M. Shaw, et al.
ANTEC Annual Technical Conference 1991