U. Gösele, K.N. Tu
Journal of Applied Physics
A series of codeposited alloy films of Pt-Si with a composition changing from Pt75Si25 to Pt50Si50 and of Pd-Si changing from Pd75Si25 to Pd67Si 33 have been prepared on Si for a systematic study of shallow silicide contacts. The effects of alloy composition and heat treatment on the formation and properties of these contacts have been investigated by I-V measurement of Schottky barrier height, glancing incidence x-ray diffraction, and cross-sectional transmission electron microscopy. Shallow contacts with a depth of about 10 nm and with the Schottky barrier height of PtSi and Pd 2Si have been achieved.
U. Gösele, K.N. Tu
Journal of Applied Physics
I. Geppert, M. Eizenberg, et al.
ECS Transactions
K.N. Tu
International Symposium on Methods and Materials in Microelectronic Technology 1982
K.P. Rodbell, K.N. Tu, et al.
Physical Review B