S. Ambrogio, Pritish Narayanan, et al.
Nature
S. Ambrogio, Pritish Narayanan, et al.
Nature
Thierry Grosjean, Mathieu Mivelle, et al.
Proceedings of SPIE - The International Society for Optical Engineering 2011
Maria Sanz-Paz, Cyrine Ernandes, et al.
CLEO/Europe-EQEC 2019
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009