Fabrication and properties of thin superconducting oxide films

Thin films of Y1Ba2Cu3Oy have been deposited in a three source electron-beam heated deposition system. The films have superconducting transition temperatures of about 90 K after a post deposition annealing treatment. Film thicknesses range from 0.1 to 10 μm and several types of substrates have been used. Films grown on SrTiO3 single crystals generally show the sharpest transitions (ΔTc<1 K). The films have been characterized in a variety of ways including chemical analysis, electron and tunneling microscopy, storage and patterning studies, critical currents and fields, SQUIDs and other physical measurements. © 1987.