Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
We successfully fabricated single-crystal silicon cantilevers with spring constants as low as 10-5 N m-1 for use in magnetic resonance force microscopy applications. The fabricated ultra-thin silicon cantilevers had thicknesses ranging from 200 to 400 nm, lengths ranging from 340 to 450 νm and a width of 5 νm. We characterized their force sensitivity in the vacuum range from ambient pressure to 10-3 Pa and the temperature range from 15 to 300 K. A minimum value is observed for the internal friction, Q-1, at 160 K, which corresponds to an activation peak due to phonon scattering by atomic-scale defects. The best force sensitivity was achieved at 20 K, where it was increased by a factor of 10 as compared to that observed at room temperature. © 2005 IOP Publishing Ltd.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Alain Vaucher, Philippe Schwaller, et al.
AMLD EPFL 2022
T. Ihara, M.C. Shaw, et al.
Journal of Tribology
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films