William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
We consider the question of finding an extreme value for some function of the eigenvalues of the differential equation y″ + λφ(x) y = 0,y(0) = y(1) = 0, as φ(x) varies over a region in a function space. A characterization of the φ(x) at which the function of the eigenvalues achieves its extremum is derived. © 1979.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Imran Nasim, Melanie Weber
SCML 2024
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
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SPIE Advances in Semiconductors and Superconductors 1990