Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
Sankar Basu
Journal of the Franklin Institute