Publication
Journal of Physical Chemistry
Paper

Excimer laser photochemistry of silane-ammonia mixtures at 193 nm

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Abstract

The ArF excimer laser induced photochemistry of silane-ammonia mixtures has been studied with molecular beam sampling mass spectrometry. The observed products include disilane, trisilane, and all possible aminosilanes, SiHx(NH2)4-x, x = 0-3. These products are formed under steady-state photolysis conditions and under single-laser-pulse conditions. A mechanism for the formation of these species is proposed and quantitatively evaluated. © 1990 American Chemical Society.

Date

01 May 2002

Publication

Journal of Physical Chemistry

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