E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
We study the effect of convection on the concentration profiles in electrolytic cells during electrochemical deposition without a supporting electrolyte. We give theoretical evidence that convection decreases the size of the space charge on the cathodic side during fast electrochemical deposition. This effect may provide a limiting amplitude of the convective motion. © 1993 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Lawrence Suchow, Norman R. Stemple
JES
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings