William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Multiconductor or multiwire arrangements find many applications in electronic systems. Examples are interconnections between digital circuits or integrated microwave circuits. Equivalent circuit models are derived here from an integral equation to establish an electrical description of the physical geometry. The models, which are appropriately called partial element equivalent circuits (PEEC), are general in that they include losses. Models of different complexity can be constructed, to suit the application at hand. Copyright © 1974 by The Institute of Electrical and Electronics Engineers, Inc.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A. Gangulee, F.M. D'Heurle
Thin Solid Films