Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new metastable body-centered tetragonal phase of Mn has been grown epitaxially at room temperature on Pd {001} up to thicknesses of 21 layers. Low-energy electron diffraction (LEED) intensity analysis has determined two important structural parameters: the bulk interlayer spacing and a 5%-larger first interlayer spacing. Assumption that the film is a cubic phase in plane strain leads to the conclusion that the phase is probably face-centered cubic with an equilibrium lattice parameter of 3.80Å, which is much larger than a theoretical non-magnetic equilibrium value and indicates that the phase probably is magnetic. © 1989.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
R.W. Gammon, E. Courtens, et al.
Physical Review B