J.C. Marinace
JES
Results are presented detailing the crystallographic quality of a number of metal films deposited by epitaxial sputter deposition. Such films have single-orientation f.c.c., h.c.p., b.c.c. and hybrid crystal structures, and include the elements Ag, Au, Co, Cr, Cu, Fe, Rh, Ru, Pd and V. The crystal structure was characterized using X-ray diffraction analysis.
J.C. Marinace
JES
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
J.A. Barker, D. Henderson, et al.
Molecular Physics
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989