Frank Stem
C R C Critical Reviews in Solid State Sciences
Results are presented detailing the crystallographic quality of a number of metal films deposited by epitaxial sputter deposition. Such films have single-orientation f.c.c., h.c.p., b.c.c. and hybrid crystal structures, and include the elements Ag, Au, Co, Cr, Cu, Fe, Rh, Ru, Pd and V. The crystal structure was characterized using X-ray diffraction analysis.
Frank Stem
C R C Critical Reviews in Solid State Sciences
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Hiroshi Ito, Reinhold Schwalm
JES