Epitaxial growth of metals by sputter deposition

Abstract

Results are presented detailing the crystallographic quality of a number of metal films deposited by epitaxial sputter deposition. Such films have single-orientation f.c.c., h.c.p., b.c.c. and hybrid crystal structures, and include the elements Ag, Au, Co, Cr, Cu, Fe, Rh, Ru, Pd and V. The crystal structure was characterized using X-ray diffraction analysis.