About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Opt. Eng.
Conference paper
Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
Abstract
The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 635 and 114 Å, and the reflectivity is increased by a factor of 2 in both cases. Accumulation of roughness during deposition is eliminated. An estimate of the presently achievable reflectivity for normal incidence mirrors in the λ = 44 to 120 Å wavelength range is given. © 1990 Society of Photo-Optical Instrumentation Engineers.