Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report a new phenomenon concerning the photoluminescence (PL) from AlxGa1-xAs/GaAs (x = 0.31) quantum wells with Be-delta-doping at the well center. For excitation photon energy larger than the barrier band gap, the PL intensity ratio between the free-to-bound and the excitonic transitions was found to display a strong oscillation as a function of the well width. For "resonant" well widths, the free-to-bound transition was observed to be 2.3 times as strong as the excitonic transitions. We correlate this phenomenon with the electron capture efficiency from the barrier into the well, which also exhibits a similar oscillation as a function of the well width. © 1994.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
J.Z. Sun
Journal of Applied Physics