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Publication
Materials Science and Engineering B
Paper
Electronic structure in confined volumes using spatially resolved electron energy loss scattering
Abstract
The instrumental requirements, spectral processing and interpretation for spatially resolved electron energy loss scattering appropriate for electronic structure determinations are reviewed. As an example, the recent Si L2, 3 absorption spectra obtained with 0.2 eV resolution in GeSi alloy layers 5-50 nm thick are discussed. © 1992.