Conference paper
Ge p-channel MOSFETS with La2O3 and A1 2O3 Gate dielectrics
C. Rossel, A. Dimoulas, et al.
ESSDERC 2008
We report electrical measurements on hexagonal silicon-germanium (hex-SiGe), a group IV alloy with direct bandgap. Electrical contacts are formed by metal alloying and doping is achieved using ion implantation. The metastable hex-SiGe phase is recovered after implantation by solid phase recrystallization. Independent of the metal used, contacts on n-type samples resulted in Schottky barriers due to Fermi level pinning of hex-SiGe. Overall, this constitutes a first step toward use of hex-SiGe for optoelectronic applications.
C. Rossel, A. Dimoulas, et al.
ESSDERC 2008
J.W. Seo, Ch. Dieker, et al.
Microelectronic Engineering
Lukas Czornomaz, N. Daix, et al.
IEDM 2012
A. Dimoulas, Y. Panayiotatos, et al.
ECS Meeting 2008