A. Gangulee, F.M. D'Heurle
Thin Solid Films
Paper
Elasticity and density of amorphous aluminum oxide
Abstract
No abstract available.
Related
Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology
Frank Stem
C R C Critical Reviews in Solid State Sciences
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures