J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
R. Ghez, J.S. Lew
Journal of Crystal Growth
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009