R. Filippi, E.N. Levine, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The 1/f noise of polycrystalline gold films (5 μm wide and 0.5 μm thick) was found to decrease in the presence of hydrogen, to a level comparable with that in a single-crystal gold film. Additionally, hydrogen was found to segregate to the metal-substrate interface. On the basis of these results and recent evidence in the literature, we propose that hydrogen interacting with interface defects is responsible for both the observed 1/f noise decrease and the previously reported electromigration enhancements.
R. Filippi, E.N. Levine, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
M.D. Thouless, K.P. Rodbell, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
K.P. Rodbell, J.L. Hurd, et al.
MRS Fall Meeting 1995
J.M.E. Harper, C. Cabral Jr., et al.
MRS Spring Meeting 1999