About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
MEMS 2006
Conference paper
Dynamics of silicon micro-heaters: Modelling and experimental identification
Abstract
In this paper we present a novel tractable feedback model that captures the thermo-electric dynamics of silicon microheaters. The validity of the model is demonstrated using an analytical derivation from physical principles. Furthermore the model is applied to the synthesis of specific temperature profiles. © 2006 IEEE.