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Publication
ICOPS 1994
Conference paper
Dynamics of charged particulates in plasmas
Abstract
The conditions for the phase transition (i.e., freezing and melting) are determined and the equation of state for the particulate system is obtained through the use of N - body molecular dynamical simulations with appropriate periodic boundary conditions. Presented are results of numerical calculations of polarization forces under realistic conditions for low-pressure etching / deposition plasmas.