T.C. Reiley, L.-S. Fan, et al.
Microelectronic Engineering
No abstract available.
T.C. Reiley, L.-S. Fan, et al.
Microelectronic Engineering
V. Raman, T.C. Reiley
Journal of Materials Science Letters
P.H. Kasai, V. Raman
Tribology Letters
A.C.M. Yang, R.D. Allen, et al.
Journal of Applied Polymer Science