Dry-released nickel micromotors with low-friction bearing structure

Abstract

A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of silicon-dioxide were compared by experiment.