Paul S. Bagus, Gianfranco Pacchioni
Surface Science
Paper
Dry etch challenges of 0.25 μm dual damascene structures
Related
Conference paper
A survey of defects in strained Si layers
S.W. Bedell, H. Chen, et al.
MRS Proceedings 2004
J. Choros, G.G. Adams
Journal of Applied Mechanics, Transactions ASME
Conference paper
Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000