Vide: Science, Technique et Applications

Paper

01 Dec 1997

Dry etch challenges of 0.25 μm dual damascene structures

Abstract

No abstract available.

Paper

Nanogel star polymer architectures: A nanoparticle platform for modular programmable macromolecular self-assembly, intercellular transport, and dual-mode cargo delivery

Victor Y. Lee, Karen Havenstrite, et al.

Advanced Materials

Paper

The stability of Si₁-_xGe_x strained layers on small-area trench-isolated silicon

K. Schonenberg, Siu-Wai Chan, et al.

Journal of Materials Research

Review

Surface chemistry on semiconductors studied by molecular-beam reactive scattering

Ming L. Yu, Lisa A. DeLouise

Surface Science Reports

Conference paper

NEW RELIABLE STRUCTURE FOR HIGH TEMPERATURE MEASUREMENT OF SILICON WAFERS USING A SPECIALLY ATTACHED THERMOCOUPLE.

S. Cohen, T.O. Sedgwick, et al.

MRS Proceedings 1983

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