Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We describe here the preparation and characterization of the first processible nonlinear optical (NLO) polyimide where the chromophore is not incorporated using a flexible tether functionality. The polymer has a very high glass temperature and shows exceptional thermal and chemical stability. Poled samples also show outstanding orientational stability, consistent in part with the high glass transition temperature. © 1995, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Sung Ho Kim, Oun-Ho Park, et al.
Small
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering