Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We describe a matrix formulation of the iterative domain decomposition method in Natarajan [SIAM J. Sci. Comput., 16 (1995), pp. 470-495]. From one point of view, this method can be regarded as a preconditioning technique for the interface Schur-complement operator obtained from a decomposition into nonoverlapping subdomains. Prom another point of view, it can be viewed es a method of the Schwarz type for overlapping subdomains, but with an "overlap" between the physical space in one subdomain and the leading components of the eigenspace induced by the Steklov-Poincaré operator in the complementary domain.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Sankar Basu
Journal of the Franklin Institute
Chai Wah Wu
Linear Algebra and Its Applications