Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
We describe a matrix formulation of the iterative domain decomposition method in Natarajan [SIAM J. Sci. Comput., 16 (1995), pp. 470-495]. From one point of view, this method can be regarded as a preconditioning technique for the interface Schur-complement operator obtained from a decomposition into nonoverlapping subdomains. Prom another point of view, it can be viewed es a method of the Schwarz type for overlapping subdomains, but with an "overlap" between the physical space in one subdomain and the leading components of the eigenspace induced by the Steklov-Poincaré operator in the complementary domain.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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