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Polysilanes: solution photochemistry and deep UV lithography
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This method, which combines semiconductor manufacturing technology with molecular biology, has been used to build DNA and RNA arrays at densities as high as 10 6 sites/cm 2.
R.D. Miller, G.M. Wallraff, et al.
ACS PMSE 1988
R.D. Miller, K.R. Carter, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
G.M. Wallraff, W.D. Hinsberg, et al.
Microlithography 1995
J.L. Hedrick, Jeff W. Labadie, et al.
Macromolecules