The DX centre
T.N. Morgan
Semiconductor Science and Technology
We demonstrate that our secondary mass ion spectroscopy (SIMS) method for the determination of the mole fraction in solid InxGa1-xN solutions is accurate and reproduceable without need of reference samples. The method is based on measuring relative current values of CsM+ (M=Ga, In) secondary ions. The claim of reliable SIMS determination without reference samples was confirmed by four independent analytical methods on the same samples with a relative error in the InN mole fraction determination below 15%.
T.N. Morgan
Semiconductor Science and Technology
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP