PaperDetection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopyJ.M. Jasinski, E.A. Whittaker, et al.Applied Physics Letters
PaperLaser detection of diatomic products of plasma sputtering and etchingR.E. Walkup, Ph. Avouris, et al.Applied Physics Letters
Conference paperGas phase and gas surface kinetics of transient silicon hydride speciesJ.M. JasinskiMRS Fall Meeting 1993
PaperThe role of surface reactions in monosilane pyrolysisB.A. Scott, R.D. Estes, et al.The Journal of Chemical Physics