Frank Stem
C R C Critical Reviews in Solid State Sciences
Sorption of water vapor into thin films of a crosslinked dimethacrylate UV‐cured polymer was measured by means of a quartz crystal microbalance apparatus. The diffusion coefficient and solubility were obtained. An upper limit to the water vapor diffusion coefficient, namely, the diffusion coefficient for liquid water in intimate contact with the sample, was measured for reference purposes by both gravimetric and infrared spectral techniques. A water uptake value for thick films was obtained gravimetrically as a reference for the thin film value. Measurement of the diffusion coefficient allows the determination of the length of time that the photopolymer could act as an effective water vapor barrier. Copyright © 1992 John Wiley & Sons, Inc.
Frank Stem
C R C Critical Reviews in Solid State Sciences
Ellen J. Yoffa, David Adler
Physical Review B
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990