SPIE Advanced Lithography 2008
Conference paper

Device-oriented directed self-assembly of lamella microdomains from a block copolymer containing hybrid

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Directed self-assembly (DSA) of a block copolymer containing hybrid material using topographic guiding patterns is presented in this paper. Lamellar microdomains of the hybrid material, which is a mixture of poly(styrene-b- ethylene oxide) (PS-b-PEO) and organosilicate (OS) precursor, have orientational correlation length about five times longer than typical organic block copolymers such as poly(styrene-b-methyl methacrylate) (PS-b-PMMA). The longer correlation length (i.e. bigger grain size) makes it possible to align the lamellar microdomain into geometries similar to device layouts. We report one-dimensional assembly of lamellar microdomains on substrates, which gives crossbar and multifinger nanostructures.