Publication
ISTFA 2017
Conference paper

Device channel temperature measurement using NIR emission

Abstract

In this paper, we present a technique for device temperature measurement using spontaneous near infrared (NIR) emission from an Integrated Circuit (IC). By leveraging modeling and data analysis, time-integrated emission measurements are used to estimate the temperature increase due to switching activity inside the channel of CMOS transistors. The non-invasive nature of the technique allows one to reliably monitor the temperature of any device on-chip without the need for circuit modifications or dedicated on-chip sensors and with a higher spatial resolution than thermal cameras. This method has important applications for modeling heat dissipation during early process development, localizing hot spots, calibrating on-chip sensors, etc. In this paper, temperature is estimated by fitting empirical emission data to an emission model that can be solved for device channel temperature.

Date

Publication

ISTFA 2017

Authors

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