E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Sung Ho Kim, Oun-Ho Park, et al.
Small
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008