Abstract
In this paper, we present a systematic control design and analysis for a two-dimensional nano-positioner. The primary emphasis of the paper is on the robustness of the closed-loop device as these flexure-stage-based, piezoactuated nano-positioners are nonlinear and operate in diverse conditions. To this end, we have used many tools from modern control theory to model devices and to quantify device resolution, bandwidth, and robustness. The implementation of this procedure for the simultaneous achievement of the objectives of robustness, high precision and high bandwidth is presented. The merits of the paradigm are demonstrated through experimental results. © 2005 IEEE.